General Relationship for the Thermal Oxidation of Silicon

Keywords

Thermal oxidation, Silicon, Oxide, Diffusion, Partial pressure

References

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• Boundary Layer TheoryHermann Schlichting, Klaus Gersten — 1955
• Thermal Oxidation of SiliconNorio Karube, Kakuji Yamamoto, Masahide Kamiyama — 1963
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• Oxidation of Silicon by High‐Pressure SteamJ. R. Ligenza — 1962
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• Evidence for Oxidation Growth at the Oxide‐Silicon Interface from Controlled Etch StudiesW. A. Pliskin, R. P. Gnall — 1964
• Thermal Oxidation of Heavily Doped SiliconB. E. Deal, Michael C. Sklar — 1965
• Theory of the oxidation of metalsN. Cabrera, N. F. Mott — 1949
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• EFFECT OF CRYSTAL ORIENTATION ON OXIDATION RATES OF SILICON IN HIGH PRESSURE STEAMJ. R. Ligenza — 1961
• The mechanisms for silicon oxidation in steam and oxygenJ. R. Ligenza, W. G. Spitzer — 1960
• Growth and Structure of Si Oxide Films on Si SurfaceHiroshi Edagawa, Yoshinori Morita, Shun-ichi Maekawa — 1963
• Oxygen exchange between silica and high pressure steamW. G. Spitzer, J. R. Ligenza — 1961
• Water in silica glassA. J. Moulson, J.P. Roberts — 1961
• Permeation of Gaseous Oxygen through Vitreous SilicaFrancis J. Norton — 1961
• Rates of Formation of Thermal Oxides of SiliconH. C. Evitts, H. W. Cooper, S. S. Flaschen — 1964
• The High Temperature Oxidation of SiliconJunhui Law — 1957

Cited by

• Low Temperature Thermally Activated CVD of Silicon on Molybdenum for Oxidation ProtectionB. Jolly — 2014
• Nanosilicon in water as a source of hydrogen: size and pH matterJennifer Mullet, Karen Jung, Marcia Hills — 2011
• A model SiC-based fibre with a low oxygen content prepared from a polycarbosilane precursorG. Chollon, Mike Czerniak, R. Pailler — 1997
• Nanolink-based thermal devices: integration of ALD TiN thin filmsA.W. Groenland — 2011
• DESIGN AND FABRICATION OF SERPENTINE-HINGED SILICON MICRO-MIRROR DEVICESNicholas Wiswell — 2012
• Ultrathin silicon wafer bonding physics and applicationsMichael H. Beggans — 2001
• SiO2 as an insulator for SiC devicesC. Harris, В. В. Афанасьев — 1997
• Vers un matériau virtuel pour les composites céramiquesMartin Genet — 2010
• DESIGN, FABRICATION, AND CHARACTERIZATION OF ELECTROSTATICALLY-ACTUATED SILICON MICRO-MIRRORSDylan L Chesbro — 2010
• Manufacturing Gallium Doped ZnO Thin Films Suitable for Use in Thin Film Transistors Using Unbalanced Magnetron SputteringTimothy Russell Jones — 2013
• Ductile Mode Material Removal of Ceramics and SemiconductorsDeepak Ravindra — 2011
• Corrosive degradation of a dense Si3N4 in a burner rigT. Graziani, D. Baxter, A. Bellosi — 1997
• THE DESIGN AND FABRICATION OF AN ELECTROSTATICALLY ACTUATED DIAPHRAGM WITH A SILICON-ON-INSULATOR WAFERElizabeth L Brooks — 2013
• Prévision de la corrosion sèche des conteneurs de déchets radioactifs en condition d'entreposage : étude des mécanismes d'oxydation du fer à basse température et simulation numérique de la croissance d'une couche d'oxydeN. Bertrand — 2006
• Hocheffiziente Industriesolarzellen mit selektiver OberflächendotierungFelix Book — 2014
• Nanoindentation of Annealed and As-Sputtered Thin Films of Nickel Titanium Shape Memory AlloysMatthew Tyson Lewis — 2010
• Oberflächenpassivierung von kristallinen Silizium-SolarzellenBernd Bitnar — 1998
• Dry and wet oxidation of an Si2N2O-ZrO composite materialMaiken Heim, J Chen, Robert Pompe — 1997
• Organic transistors based on pentacene and dibenzothiophene derivativesDaniel Kolb — 2008
• Fabrication, Characterization, and Modelling of Self-Assembled Silicon Nanostructure Vacuum Field Emission DevicesM. R. Bari — 2011

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