Manufacturing Gallium Doped ZnO Thin Films Suitable for Use in Thin Film Transistors Using Unbalanced Magnetron Sputtering
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- Type
- article
- Published
- 2013-01-01
- Cited by
- 0
- References
- 17
- Access
- Open access
- OpenAlex
- https://openalex.org/W51796375
- Semantic Scholar
- https://api.semanticscholar.org/CorpusID:55710246
Keywords
Sputter deposition, Materials science, Optoelectronics, Thin film, Doping
References
- Electronic circuit analysis and design
- Wafer-scale assembly of highly ordered semiconductor nanowire arrays by contact printing.
- High-performance ZnO nanowire field effect transistors
- Effects of substrate temperature and near-substrate plasma density on the properties of dc magnetron sputtered aluminum doped zinc oxide
- Fine-Line Patterning of Transparent Ga-Doped ZnO Thin Films by Wet-Etching
- Large scale, highly ordered assembly of nanowire parallel arrays by differential roll printing
- Heterogeneous Three-Dimensional Electronics by Use of Printed Semiconductor Nanomaterials
- Electrical properties of ZnO nanowire field effect transistors characterized with scanning probes
- In situ spectroscopic ellipsometry growth studies on the Al-doped ZnO films deposited by remote plasma-enhanced metalorganic chemical vapor deposition
- General Relationship for the Thermal Oxidation of Silicon
- ZnO nanowire transistors.
- Synthesis of ZnO nanoparticles by hydrothermal method
- Thin Solid Films
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