Principles of Plasma Discharges and Materials Processing

Keywords

Plasma, Diffusion, Atomic physics, Kinetic energy, Collision theory

References

• Film deposition by plasma techniques光晴 小沼 — 1992
• Electrical Engineering: An IntroductionS. E. Schwarz, W.G. Oldham — 1984
• Atomic collisions : heavy particle projectilesE. W. McDaniel, James B. Mitchell, M.E. Rudd — 1993
• Theory of spherical and cylindrical Langmuir probes in a collisionlessJ. G. Laframboise — 1966
• Radio waves in the ionosphereK. G. Budden, Howard Chang — 1962
• Potential energy curves for N2, NO, O2 and corresponding ionsForrest R. Gilmore — 1965
• Collision phenomena in ionized gasesE. W. McDaniel, Ernest P. Gray — 1964
• Plasma diagnostics with microwavesMark A. Heald, C. B. Wharton, H. P. Furth — 1965
• Atomic Collisions: Electron and Photon ProjectilesE. W. McDaniel, G. H. Dunn — 1989
• Mechanisms of silicon etching in fluorine- and chlorine-containing plasmasDaniel Flamm — 1990
• Physics at surfacesG.A. Somorjai — 1989
• An Introduction to Thermonuclear ResearchR. S. Pease — 1959
• Basic Principles of Plasma Physics: A Statistical ApproachBarry J. Rye — 1974
• The Spectra and Structure of Simple Free RadicalsJ. Michael Hollas — 1972
• Fundamentals of surface and thin film analysis : North Holland, Amsterdam, 1986 (ISBN 0-444-00989-2). xviii + 352 pp. Price Dfl. 125.00.L. C. Feldman, James W. Mayer, M. Grasserbauer — 1987
• Sheath Heating in Low-Pressure Capacitive Radio Frequency DischargesB.P. Wood — 1991
• Sputtering by particle bombardmentRainer Behrish — 1983
• Waves in plasmas.S. Lea — 1993

Cited by

• Industrial-Scale Process Control by Means of Electrostatics ProbesP. Špatenka, V. Brunnhofer, J. Krumeich — 2000
• Investigation of a miniature differential ion thrusterCheryl Collingwood — 2011
• Study of the Gasdynamic Mirror (GDM) Propulsion SystemRicky Tang — 2011
• Atmospheric pressure Radio Frequency discharges, diagnostic and numerical modelingN. Balcon — 2007
• Surface Properties of Hard Fluorinated Amorphous Carbon Films Deposited by Pulsed-DC DischargesMiguel Rubio Roy — 2010
• Surface diffusion: the low activation energy path for nanotube growth.Salvador Colvée, Alanah Martín — 2005
• Inductively Coupled Nitrous Oxide Plasma Etching of Parylene-C FilmsKwang‐Ho Kwon — 2009
• Plasma-enhanced chemical vapor deposition synthesis of vertically oriented graphene nanosheets.Bama Athreya — 2013
• Power supply and impedance matching to drive technological radio-frequency plasmas with customized voltage waveforms.James B. Franek, Steven Brandt, Birk Berger — 2015
• Generation and control of reactive species in low temperature atmospheric pressure plasma sources.Seán Kelly — 2014
• Fluorination mechanisms of Al2O3 and Y2O3 surfaces irradiated by high-density CF4∕O2 and SF6∕O2 plasmasKazuhiro Miwa, Noriharu Takada, Koichi Sasaki — 2009
• Plasma Treatment of Polymers to Generate Stable, Hydrophobic SurfacesDirk Hegemann, Herwig Brunner, Christian Oehr — 2001
• Characterization of ion sources for compact accelerator neutron productionEmily A. Baxter — 2011
• Laser propagation in dense magnetized plasma.徳郎 久保, 聡 中村, 健介 沢田 — 2016
• Significant Improvement of Copper Dry Etching Property of a High-Pressure Hydrogen-Based Plasma by Nitrogen Gas AdditionHiromasa Ohmi, Jumpei Sato, Yoshiki Shirasu — 2019
• UV-Emission from Poly-Phase Molecular Discharge/Plasma Confined by Multi-Pole Magnetic FieldKazunori Matsumoto, Yuki Taira — 2009
• Characterizing plasma with emission tomography-Feasibility study on synthetic and experimental data.José Iñiguez — 2020
• Plasma Parameters Obtained with Planar Probe and Optical Emission SpectroscopyA. M. Daltrini, Stanislav A. Moshkalev, Laura Swart — 2007
• Plasma assisted technology for Si-based photonic integrated circuitsMatteo Dainese — 2005
• A method for modelling radio frequency deposition or etch plasma chambers using an equivalent electronic component circuitBrian Cregan — 2004

Related papers

• Industrial Plasma EngineeringJohannes Roth — 1995
• Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCCC.K. Birdsall — 1991
• Solving the Boltzmann equation to obtain electron transport coefficients and rate coefficients for fluid modelsGerjan Hagelaar, Leanne C. Pitchford — 2005
• CRC Handbook of Chemistry and PhysicsW.M. Haynes — 1990
• The Bohm criterion and sheath formationK.‐U. Riemann — 1991
• A Monte Carlo collision model for the particle-in-cell method: applications to argon and oxygen dischargesVahid Vahedi, M. Surendra — 1995
• Book reviewPrinciples of plasma discharges and material processing: M.A. Lieberman and A.J. Lichtenberg, John Wiley, New York, 1994, 572 ppRobert Keatch — 1996
• Global model of Ar, O2, Cl2, and Ar/O2 high‐density plasma dischargesChae-Jin Lee, M. A. Lieberman — 1995