An investigation of the beam damage effect on in situ liquid secondary ion mass spectrometry analysis.

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Summary

Usable ion yields for both positive and negative characteristic signals (including molecular ions and characteristic fragment ions) were achievable based on optimized experimental conditions for in situ liquid SIMS analysis, and beam damage may not be a concern if proper experimental conditions are used.

Type
article
Published
2017-12-15
Cited by
14
References
34

Keywords

Chemistry, Secondary ion mass spectrometry, Ion, Analytical Chemistry (journal), Static secondary-ion mass spectrometry

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