Direct comparison of Au3+ and C60+ cluster projectiles in SIMS molecular depth profiling

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Summary

The sputtering properties of two representative cluster ion beams in secondary ion mass spectrometry (SIMS), C60+ and Au3+, have been directly compared to further optimize the use of cluster projectiles for SIMS molecular depth profiling experiments.

Type
article
Published
2007-03-01
Cited by
50
References
26
Access
Open access

Keywords

Chemistry, Sputtering, Cluster (spacecraft), Projectile, Analytical Chemistry (journal)

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