Effect of Higher Silanes in Silane Plasmas on Properties of Hydrogenated Amorphous Silicon Films
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- Type
- article
- Published
- 1999-11-15
- Cited by
- 1
- References
- 5
- Access
- Open access
- OpenAlex
- https://openalex.org/W1995483937
- Semantic Scholar
- https://api.semanticscholar.org/CorpusID:119362136
Keywords
Silanes, Silane, Amorphous silicon, Silicon, Amorphous solid
References
- Investigation of Particulate Growth Processes in RF Silane Plasmas Using Light Absorption and Scanning Electron Microscopic Methods
- Spatial Distribution of SiH3 Radicals in RF Silane Plasma
- New Interpretation of the Effect of Hydrogen Dilution of Silane on Glow-Discharged Hydrogenated Amorphous Silicon for Stable Solar Cells
- Characterization of Monolayer-Level Composition and Optical Gap Profiles in Amorphous Silicon-Carbon Alloy Bandgap-Modulated Structures
- Material Basis of Highly Stable a-Si:H Solar Cells
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