QUANTITATIVE IMAGING OF SHEET RESISTANCE WITH A SCANNING NEAR-FIELD MICROWAVE MICROSCOPE

D. E. Steinhauer, C. P. Vlahacos, S. K. Dutta, B. J. Feenstra, F. C. Wellstood · Applied Physics Letters · 1997

Explore this paper's citation graph

Type: article
Published: 1997-12-15
Cited by: 118
References: 10
Access: Open access
DOI: https://doi.org/10.1063/1.120918
arXiv: https://arxiv.org/abs/cond-mat/9712171
OpenAlex: https://openalex.org/W1974340575
Semantic Scholar: https://api.semanticscholar.org/CorpusID:119360490

Keywords

Sheet resistance, Materials science, Microscope, Ohm, Wafer

References

Spatially resolved measurements of HTS microwave surface impedanceJohn Gallop, Ling Hao, Farhat Abbas — 1997
Near‐field scanning microwave microscope with 100 μm resolutionC. P. Vlahacos, R. C. Black, Steven M. Anlage — 1996
Confocal resonators for measuring the surface resistance of high‐temperature superconducting filmsJ. Martens, V.M. Hietala, David S. Ginley — 1991
Scanning microwave microscopy of active superconducting microwave devicesSteven M. Anlage, C. P. Vlahacos, S. K. Dutta — 1997
Noncontact Technique for the Local Measurement of Semiconductor ResistivityC. A. Bryant, J. B. Gunn — 1965
Non-destructive characterization of materials by evanescent microwavesMassood Tabib‐Azar, Neil S. Shoemaker, Stephen E. Harris — 1993
Surface resistance imaging with a scanning near-field microwave microscopeD. E. Steinhauer, C. P. Vlahacos, S. K. Dutta — 1997
Resistivity measurement of thin semiconductor films on metallic substratesSteve Hogan, S. Wagner, Frank S. Barnes — 1979
High-spatial resolution resistivity mapping of large-area YBCO films by a near-field millimeter-wave microscopeM. Golosovsky, A. L. Galkin, D. Davidov — 1996
A Sapphire Resonator for Microwave Characterization of Superconducting Thin FilmsC. Wilker, Zhongxiang Shen, V.X. Nguyen — 1993

Cited by

Low-temperature-compatible tunneling-current-assisted scanning microwave microscope utilizing a rigid coaxial resonator.Eva Peiró i Ambou — 2016
Microwave Nonlinearities in High-Tc Superconductors: The Truth Is out ThereSteven M. Anlage, Wensheng Hu, C. P. Vlahacos — 1998
60 GHz active microscopy with a bow-tie antenna as near-field probeRachid Omarouayache, Laurent Chusseau, Pierre Payet — 2015
A novel Microwave Frequency Scanning Capacitance MicroscopeAtif Imtiaz, Steven M. Anlage — 2002
Simultaneous RF electrical conductivity and topography mapping of smooth and rough conductive traces using microwave microscopy to identify localized variationsMaría F. Córdoba-Erazo, Eduardo A. Rojas-Nastrucci, T. Weller — 2015
Phase separation in La5∕8Sr3∕8MnO3(30%)+LuMnO3(70%) bulk sample studied by scanning microwave microscopyJino Lee, Jewook Park, Ahram Kim — 2005
Microwave microscopy and its applicationsMassood Tabib‐Azar — 2001
Near-field Scanning Microwave Microscopy and its Applications in Characterization of Dielectric MaterialsQinxin Zhang — 2006
Near-field pattern of a scanning aperture microwave probe: experimental determination and computer simulationsM. Golosovsky, A. F. Lann, D. Davidov — 2000
Microfluidic microwave resonant sensorsDavid J. Rowe — 2012
Tomographic effects of near-field microwave microscopy in the investigation of muscle cells interacting with multi-walled carbon nanotubesMarco Farina, Andrea Di Donato, Tamara Monti — 2012
Electric Field Distribution in A Backlash of the Coaxial Resonator of A Microwave MicroscopeD. Poletaev, Ye.P. Taran, A. A. Shadrin — 2006
Quasistatics and electrodynamics of near-field microwave microscopeA. N. Reznik — 2014
Microwave near-field imaging of conducting objects of a simple geometric shapeM. Golosovsky, A. F. Lann, D. Davidov — 2000
Measurement of the sheet resistance of resistive films on thin substrates from 120 to 175 GHz using dielectric waveguidesR.J. Collier, D. G. Hasko — 2002
Quantitative Conductivity Mapping of SrTiO3–LaAlO3–LaTiO3 Ternary Composition-Spread Thin Film by Scanning Microwave MicroscopeSohei Okazaki, Noriaki Okazaki, Yasushi Hirose — 2008
Microwave frequency ferroelectric domain imaging of deuterated triglycine sulfate crystalsD. E. Steinhauer, Steven M. Anlage — 2001
High-frequency eddy-current technique for thickness measurement of micron-thick conducting layersF. Sakran, M. Golosovsky, H. Goldberger — 2001
Single-Chip CMOS-MEMS Dual Mode Scanning Microwave MicroscopeMostafa Azizi, Niladri Sarkar, Raafat R. Mansour — 2013
Sodium chloride sensing by using a near-field microwave microprobeArsen Babajanyan, Jongchul Kim, Songhui Kim — 2006

Related papers

High-Temperature Heat-Treatment of c-, a-, r-, and m-Plane Sapphire Substrates in Mixed Gases of H2 and N2Kazushiro Nomura, Shoko Hanagata, Atsushi Kunisaki — 2013
Simulating Physics Experiments in Spreadsheets – Experimenting with Ohm’s LawZaheer Uddin, Muhammad H. Zaheer — 2019
Development of a precision one ohm resistance standardArmen Grossenbacher — 1998
Preparing for the new volt and ohmBarry N. Taylor — 1989
A Study on the Cleaning Technology for Sapphire WaferHai Zhou — 2005
Characterization of Boron Diffusion Phenomena According to the Specific Resistivity of N-Type Si Wafer.Woojin Lee, Chel-Jong Choi, Gye‐Choon Park — 2016
Development of a Characterization Tool for Determination of Sheet Resistance at 9 Places of Large Area 156 mm by 156 mm Diffused Silicon Wafer in Less than 5 Seconds and Its Application in Making High Efficiency Silicon Solar CellsM. Shadab Siddiqui, Anil Kumar Saxena, Shivangi — 2018
POCl3 diffusion process optimization for the formation of emitters in the crystalline silicon solar cellsKarthick Murukesan, Sandeep Kumbhar, A. K. Kapoor — 2014
Noncontact sheet resistance measurement technique for wafer inspectionKrzysztof Kempa, Jan Rommel, Roman Litovsky — 1995