Integrating Optical Force Sensing with Visual Servoing for Microassembly
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Summary
Experimental results that investigate the integration of two disparate sensing modalities, force and vision, for sensor-based microassembly are presented, which will aid in the development of complex hybrid MEMS devices in two ways; by enabling the microassembly of more complex MEMS prototypes; and in theDevelopment of automatic assembly machines for assembling and packaging future MEMs devices that require increasingly complex assembly strategies.
- Type
- article
- Published
- 2000-07-01
- Cited by
- 48
- References
- 43
- OpenAlex
- https://openalex.org/W1505332024
- Semantic Scholar
- https://api.semanticscholar.org/CorpusID:36368431
Keywords
Deflection (physics), Computer science, Repeatability, Microelectromechanical systems, Optics
References
- Visual Servoing: Real-Time Control of Robot Manipulators Based on Visual Sensory Feedback
- Dynamic visual servo control of robots: An adaptive image-based approach
- Precision Machine Design
- Hand-eye system in nano manipulation world
- Visually guided microassembly using optical microscopes and active vision techniques
- A micropositioning device for precision automatic assembly using impact force of piezoelectric elements
- Attractive mode force microscopy using a feedback‐controlled fiber interferometer
- Stress measurement by microRaman spectroscopy of polycrystalline silicon structures
- Visual compliance: task-directed visual servo control
- Sub‐centimeter micromachined electron microscope
- On the Representation and Estimation of Spatial Uncertainty
- Symmetric differential capacitive pressure sensor
- Dynamic sensor-based control of robots with visual feedback
- Guiding a robot by visual feedback in assembling tasks
- Design of a ring-shaped three-axis micro force/torque sensor
- A differential interferometer for force microscopy
- Integration, coordination, and control of multi-sensor robot systems
- Force microscope using a fiber‐optic displacement sensor
- Fusion of Multisensor Data
- Force‐balancing force sensor with an optical lever
Cited by
- Microcantilever-based force sensing, control and imaging
- Gluing free assembly of an advanced 3D structure using visual servoing.
- Vision-Based Microforce Measurement With a Large Range-to-Resolution Ratio Using a Twin-Scale Pattern
- Misalignment estimation and compensation for robotic assembly with uncertainty
- Towards fused vision and force robust feedback control of nanorobotic-based manipulation and grasping
- UNCERTAINTY ANALYSIS IN SURFACE MICROMACHINED FORCE GAUGES: CONVEX MODEL APPROACH
- Visual-servoing of a six-degree-of-freedom robotic manipulator for automated microassembly task execution
- Precision alignment and assembly of a Fourier transform microspectrometer
- Nano-robotic manipulation using a RRP nanomanipulator: Part B - Robust control of manipulator's tip using fused visual servoing and force sensor feedbacks
- A visual servoing method for high-precision chip mounting technology
- A Low-Cost Humanoid Robot with Human Gestures Imitation Capabilities
- Force and Position Control of the Pneumatic Cylinders through a Microscope with a CCD Camera
- Optomechatronic systems technology: fundamentals, state of the art, and future directions
- Visual Control of an Automatic Manipulation System by Microscope and Pneumatic Actuator
- Vision-based force measurement using geometric moment invariants
- Robotic micromanipulation for microassembly: modelling by sequencial function chart and achievement by multiple scale visual servoings
- Impulsive pedipulation of a spherical object for reaching a 3D goal position
- Visual Servo Feedback Control of a Novel Large Working Range Micro Manipulation System for Microassembly
- A flexible microassembly system based on hybrid manipulation scheme for manufacturing photonics components
- Multi-sensor control for precise assembly of optical components
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