A variable probe pitch micro-Hall effect method
Explore this paper's citation graph
Summary
This work studies in detail how the analysis of raw measurement data affects the accuracy of extracted key sample parameters, i.e., how the standard deviation on sheet resistance, carrier mobility and Hall sheet carrier density is affected by the data analysis used.
- Type
- article
- Published
- 2018-07-20
- Cited by
- 6
- References
- 21
- Access
- Open access
- OpenAlex
- https://openalex.org/W30116693
- Semantic Scholar
- https://api.semanticscholar.org/CorpusID:51830362
Keywords
Geography
References
- The Electrical Characterization of Semiconductors: Majority Carriers and Electron States
- USJ metrology : from 0D to 3D analysis.
- Review of electrical characterization of ultra-shallow junctions with micro four-point probes
- On the analysis of the activation mechanisms of sub-melt laser anneals
- Surface-sensitive conductivity measurement using a micro multi-point probe approach.
- Micro-four-point Probe Hall effect Measurement method
- Junction leakage measurements with micro four-point probes
- The conductivity of Bi(111) investigated with nanoscale four point probes
- Relationship between the correction factor of the four-point probe value and the selection of potential and current electrodes
- Effect of contact size and placement, and of resistive inhomogeneities on van der Pauw measurements
- Fast micro Hall effect measurements on small pads
- Accurate microfour-point probe sheet resistance measurements on small samples.
- Magnetoresistance measurement of unpatterned magnetic tunnel junction wafers by current-in-plane tunneling
- Semiconductor Material and Device Characterization
- High precision micro-scale Hall effect characterization method using in-line micro four-point probes
- Precision of single-engage micro Hall effect measurements
- Optimized electrode configuration for current-in-plane characterization of magnetic tunnel junction stacks
- Hall measurements on low-mobility thin films
- Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes
Cited by
- Review of Micro- and Nanoprobe Metrology for Direct Electrical Measurements on Product Wafers
- Determination of thermal diffusivity of thermoelectric materials using a micro four-point probe method
- An Enhancement of the Van Der Pauw Method
- Deconvolution of heat sources for application in thermoelectric micro four-point probe measurements
- Temperature coefficient of resistance and thermal boundary conductance determination of ruthenium thin films by micro four-point probe
- Investigation of low temperature SiGe epitaxy with high order precursors
Related papers
No related papers recorded.