Fundamentals of Microfabrication

Keywords

Microfabrication, Computer science, Medicine

References

• Magnetic microactuation of polysilicon flexure structuresJack W. Judy, R.S. Muller, H. H. Zappe — 1995
• Surface micromachined mechanisms and micromotorsMehran Mehregany, Yu‐Chong Tai — 1991
• A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coilsChang-Geun Ahn, Y.J. Kim, Mark G. Allen — 1993
• Silicon as a mechanical materialK. Petersen — 1982
• Fabrication and testing of the planar magnetic micromotorH. Guckel, K.J. Skrobis, Todd R. Christenson — 1991

Cited by

• Investigation of Various Surface Acoustic Wave Design Configurations for Improved SensitivityGreeshma Manohar — 2012
• Compliant Torsional Micromirrors with Electrostatic ActuationJianliang You — 2012
• Micromilling mechanism : research and realizationJinsheng Wang — 2009
• Laser-guided direct writing: a novel method to deposit biomolecules for biosensors arraysСопнева Елена Владимировна — 2003
• Dependence of buffer acidity and surfactant chain-length on electro-osmotic mobility in thermoplastic microchannels.ジェームズ・E ハーゲット, 賢 渡辺 — 2005
• Self-Assembled Three Dimensional Radio Frequency (RF) Shielded Containers for Cell EncapsulationEugenio Móntale — 2005
• Self-assembled single-crystal silicon circuits on plasticS.A. Stauth, Babak A. Parviz — 2006
• Construction and evaluation of a flow injection micro-analyser based on urethane-acrylate resin.Robert L. McCormick, Teresa L. Alleman — 2007
• TOLERANCE ALLOCATION FOR KINEMATIC SYSTEMSMathieu Barraja — 2004
• An integrated platform for bio-analysis and drug delivery.S. Amer, Wael Badawy — 2005
• Fast temperature cycling of the catalytic CO oxidation using microstructure reactorsM. Luther — 2008
• Tunable ZnO surface acoustic wave devices based on acoustoelectric interactionJun Zhu — 2008
• 1-Pentene Epoxidation in Titanium Silicalite-1 Microchannel Reactor: Experiments and ModellingYu Wan, Asterios Gavriilidis, King Lun Yeung — 2003
• Evaluation des solutions d’encapsulation quasi-hermétique pour les composants actifs hyperfréquencesWalim Ben Naceur — 2013
• Design for Visually Servoed MicroassemblyBharath Mukundakrishnan — 2000
• MECHANICAL PROPERTIES OF PECVD BORON CARBIDEDhairyashil Aher — 2011
• Analyse du procédé et des paramètres de fabrication par écriture-direct assistée par lumière ultraviolet pour des applications d'emmagasinage d'énergie mécaniqueMatthew S. Becker — 2013
• The study of the growth mechanism of TiO2 nanotubes and their applicationsZainab T. Y. Alabdullah — 2013
• Gas Sensors on Plastic Foil with Reduced Power Consumption for Wireless ApplicationsJérôme Courbat — 2010
• Integrated optics technology on silicon optical transducersAndreu Llobera Adan — 2002

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