Application of Micromachining Technology in Micro-sensors
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- Type
- article
- Published
- 2002-01-01
- Cited by
- 1
- References
- 0
- OpenAlex
- https://openalex.org/W2367499065
- Semantic Scholar
- https://api.semanticscholar.org/CorpusID:112362157
Keywords
Surface micromachining, Bulk micromachining, Materials science, Microelectromechanical systems, Nanotechnology
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