Magnetron sputtering: a review of recent developments and applications
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- Type
- review
- Published
- 2000-03-01
- Cited by
- 1,858
- References
- 68
- OpenAlex
- https://openalex.org/W2094491269
- Semantic Scholar
- https://api.semanticscholar.org/CorpusID:205909446
Keywords
Sputter deposition, Sputtering, Cavity magnetron, Materials science, Coating
References
- Ion implantation, sputtering and their applications
- Sputtering by Particle Bombardment III
- Charged particle fluxes from planar magnetron sputtering sources
- Unbalanced dc magnetrons as sources of high ion fluxes
- Multilayer, multicomponent, and multiphase physical vapor deposition coatings for enhanced performance
- Development of a novel structure zone model relating to the closed-field unbalanced magnetron sputtering system
- Dual-unbalanced magnetron deposition of TiN films
- Asymmetric bipolar pulsed DC: the enabling technology for reactive PVD
- The influence of magnetron configuration on ion current density and deposition rate in a dual unbalanced magnetron sputtering system
- Mid frequency sputtering with TwinMag®-a survey of recent results
- High‐rate sputtering of aluminum for metallization of integrated circuits
- Aspects and results of long-term stable deposition of Al2O3 with high rate pulsed reactive magnetron sputtering
- Effects of argon pressure and substrate temperature on the structure and properties of sputtered copper films
- Plasma‐based surface engineering processes for wear and corrosion protection
- Pulsed magnetron sputter technology
- Reactive alternating current magnetron sputtering of dielectric layers
- High-rate reactive DC magnetron sputtering of oxide and nitride superlattice coatings
- Planar magnetron sputtering
- Reactive direct current magnetron sputtering of aluminum oxide coatings
- The characteristics of a planar magnetron operated at a high power input
Cited by
- Grazing incidence X-ray scattering from magnetic thin films and nanostructures
- Adhesion failure behavior of sputtered calcium phosphate thin film coatings evaluated using microscratch testing.
- Improving optical properties of silicon nitride films to be applied in the middle infrared optics by a combined high-power impulse/unbalanced magnetron sputtering deposition technique.
- Domain Wall Dynamics probed by Magneto-Optical-Kerr-Magnetometry
- Effect of pre and post mechanical treatment on pvd coated tools' characteristics and machining performance
- Physical Vapor Deposition of Nanorods from Science to Technology
- The effect of substrate temperature of titanium aluminium nitride coating on titanium alloy (TI-6AL-4V) substrate using PVD method
- Adesão metal-polímero: dispositivos de medição e correlações físico-químicas
- Spectroscopic analysis of tungsten oxide thin films for sensor applications
- Contrôle de la croissance et de la réactivité de nanoparticules métalliques par spectroscopie optique in situ
- Deposition and Phase Transformations of Ternary Al-Cr-O Thin Films
- ZrN based Nanostructured Hard Coatings : Structure-Property Relationship
- Tribological behaviour of DLC and Si-DLC films deposited on nitrile rubber for handpump piston seals
- Optical and Structural Characterization of GaN Based Hybrid Structures and Nanorods
- Spectroscopie infrarouge exaltée de surface pour la détection de composés organiques dissous dans le milieu marin
- Hybrid plasma enhanced chemical vapour deposition/sputtering system for preparation of luminescent silicon carbon films / Nur Maisarah binti Abdul Rashid
- Wear resistance investigation of titanium nitride-based coatings
- Effects of TiN nanoparticles on the microstructure and properties of W–30Cu composites prepared via electroless plating and powder metallurgy
- Characteristics of multilayer mirrors in the X-ray and extreme ultraviolet radiation ranges
- Self-Aligned Microchip Device for Automated Measurement of Quantal Exocytosis [abstract]
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