Performance Tradeoffs Posed by Moving Magnet Actuators in Flexure-Based Nanopositioning
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- Type
- article
- Published
- 2014-02-01
- Cited by
- 68
- References
- 58
- OpenAlex
- https://openalex.org/W2013238679
- Semantic Scholar
- https://api.semanticscholar.org/CorpusID:6653631
Keywords
Actuator, Magnet, Control theory (sociology), Root mean square, Backlash
References
- Frequency Domain Properties of Scalar and Multivariable Feedback Systems
- Sensor and actuator considerations for precision, small machines: a review
- Design aspects of electromagnetic actuators
- Large Dynamic Range Nanopositioning Using Iterative Learning Control
- Comparison of linear voice coil and reluctance actuators for high-precision applications
- Control of voice coil motor nanoscanners for an atomic force microscopy system using a loop shaping technique.
- Applications of dip-pen nanolithography.
- Analysis of Halbach magnet array and its application to linear motor
- Characteristics of Beam-Based Flexure Modules
- Enlarged atomic force microscopy scanning scope: novel sample-holder device with millimeter range.
- The long-range scanning stage: a novel platform for scanned-probe microscopy
- Physical and Control System Design Challenges in Large Range Nanopositioning
- Performance comparison and modeling of PZN, PMN, and PZT stacked actuators in a levered flexure mechanism
- Development of a sub-nanometer positioning device: combining a new linear motor with linear motion ball guide ways
- Identification and Compensation of Nonlinear Friction Characteristics and Precision Control for a Linear Motor Stage
- Analysis Method of the Dynamic Force and Torque Distribution in the Magnet Array of a Commutated Magnetically Levitated Planar Actuator
- Actuators for Micropositioners and Nanopositioners
- Nanometre resolution metrology with the Molecular Measuring Machine
- Practical control method for ultra-precision positioning using a ballscrew mechanism
- Collinearity and stitching performance on an ASML stepper
Cited by
- Dynamics and Control of Flexure-based Large Range Nanopositioning Systems.
- Millimeters-Stroke Nanopositioning Actuator With High Positioning and Thermal Stability
- Auto-positioning of sliding planes based on virtual force
- A planar electromagnetic actuator based on two layer coil assembly for micro applications
- Design and Optimization of a Voice Coil Actuator for Precision Motion Applications
- A flexure-based electromagnetic nanopositioning actuator with predictable and re-configurable open-loop positioning resolution
- Conceptual design of compliant translational joints for high-precision applications
- A 2-legged XY parallel flexure motion stage with minimised parasitic rotation
- Conceptual designs of multi-degree of freedom compliant parallel manipulators composed of wire-beam based compliant mechanisms
- An Evaluation of Silicon Carbide Based Bimorph Actuators for Optical Coherence Tomography Applications
- Energy Efficiency and Performance Optimized Control of a Hybrid Feed Drive
- Integrated Servo-Mechanical Design of a Fine Stage for a Coarse/Fine Dual-Stage Positioning System
- Extended Static Modeling and Analysis of Compliant Compound Parallelogram Mechanisms Considering the Initial Internal Axial Force
- Extended Nonlinear Analysis of Exactly-Constrained Compliant Compound Parallelogram Mechanisms
- Development of an Electromagnetic Actuated Microdisplacement Module
- High-Precision Force Control of Short-Stroke Reluctance Actuators with an Air Gap Observer
- A structure design method for compliant parallel manipulators with actuation isolation
- Design and analysis of a new flexure-based XY stage
- MEMS for Nanopositioning: Design and Applications
- A Multiaxis, Large-Output, Sensing Framework of Integrating Linear Optical Encoders for Nanopositioning Systems
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