A golden-block-based self-refining scheme for repetitive patterned wafer inspections
Explore this paper's citation graph
Summary
A novel technique for detecting possible defects in two-dimensional wafer images with repetitive patterns using prior knowledge that has a learning ability that can create a golden-block database from the wafer image itself, then modify and refine its content when used in further inspections.
- Type
- article
- Published
- 2003-03-01
- Cited by
- 20
- References
- 18
- Access
- Open access
- OpenAlex
- https://openalex.org/W1979328687
- Semantic Scholar
- https://api.semanticscholar.org/CorpusID:30707739
Keywords
Block (permutation group theory), Wafer, Computer science, Template, Overhead (engineering)
References
- Patterned wafer inspection by high resolution spectral estimation techniques
- Recent advances in the automatic inspection of integrated circuits for pattern defects
- Segmentation of Printed Circuit Board Images into Basic Patterns
- Automated wafer inspection in the manufacturing line
- Automated visual inspection: 1981 to 1987
- A golden-template self-generating method for patterned wafer inspection
- Machine vision algorithms for semiconductor wafer inspection: a project with Inspex
- Automatic PCB Inspection Algorithms: A Survey
- A Survey of Automated Visual Inspection
- Digital image processing techniques for patterned-wafer inspection
- A Subpattern Level Inspection System for Printed Circuit Boards
- The P300: A system for automatic patterned wafer inspection
- ESPRIT-estimation of signal parameters via rotational invariance techniques
- Low‐voltage electron‐optical system for the high‐speed inspection of integrated circuits
- Estimation Of Signal Parameters Via Rotational Invariance Techniques- Esprit
Cited by
- Periodic Pattern Inspection Using Convolution Masks
- Defect detection in periodic patterns using a multi-band-pass filter
- Novelty detection for the inspection of light-emitting diodes
- Defect detection in patterned wafers using anisotropic kernels
- A boundary tracking approach for tape substrate pattern inspection based on skeleton information
- Multi-channel wafer defect detection using diffusion maps
- A Shift-Tolerant Dissimilarity Measure for Surface Defect Detection
- Defect detection of solar cells in electroluminescence images using Fourier image reconstruction
- Automatic surface inspection for directional textures using nonnegative matrix factorization
- Defect Detection of Skewed Images for Multilayer Ceramic Capacitors
- Defect detection in patterned wafers using multichannel Scanning Electron Microscope
- A Wavelet-Based Approach in Detecting Visual Defects on Semiconductor Wafer Dies
- Mean Shift-Based Defect Detection in Multicrystalline Solar Wafer Surfaces
- Novel Inspection Technique for Harddisk Drive Slider using Maximum Likelihood Estimator and Fuzzy Logic
- A Review and Analysis of Automatic Optical Inspection and Quality Monitoring Methods in Electronics Industry
- Detecting and Measuring Defects in Wafer Die Using GAN and YOLOv3
- A Self-Training-Based System for Die Defect Classification
- Image Inspection System for Defect Detection of Multilayer Ceramic Capacitors
- Method and X-ray inspection system for testing identical components using X-radiation
- Defect Detection of Solar Cells Using EL Imaging and Fourier Image Reconstruction
Related papers
- Fibonacci, quasicrystals and the beauty of flowers
- George Clooney, the cauliflower, the cardiologist, and phi, the golden ratio
- Golden ratio
- MATHEMATICAL PROPERTIES OF THE GOLDEN RATIO – A FASCINATING NUMBER
- A deduction of the Golden Spiral equation via powers of the Golden Ratio ϕ
- THE REPRESENTATION OF THE GOLDEN RATIO BY THE CONTINUED FRACTION
- The Pentagon Tells it all. The Golden Ratio and Fibonacci Numbers