A golden-block-based self-refining scheme for repetitive patterned wafer inspections

Explore this paper's citation graph

Summary

A novel technique for detecting possible defects in two-dimensional wafer images with repetitive patterns using prior knowledge that has a learning ability that can create a golden-block database from the wafer image itself, then modify and refine its content when used in further inspections.

Type
article
Published
2003-03-01
Cited by
20
References
18
Access
Open access

Keywords

Block (permutation group theory), Wafer, Computer science, Template, Overhead (engineering)

References

Cited by

Related papers