Ultra-high-Q toroid microcavity on a chip
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Summary
This work demonstrates a process for producing silica toroid-shaped microresonators-on-a-chip with Q factors in excess of 100 million using a combination of lithography, dry etching and a selective reflow process, representing an improvement of nearly four orders of magnitude over previous chip-based resonators.
- Type
- article
- Published
- 2003-06-06
- Cited by
- 2,102
- References
- 23
- OpenAlex
- https://openalex.org/W1554342785
- Semantic Scholar
- https://api.semanticscholar.org/CorpusID:4420078
Keywords
Resonator, Q factor, Dielectric, Wafer, Optoelectronics
References
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- Modal coupling in traveling-wave resonators.
- Quality-factor and nonlinear properties of optical Whispering-Gallery modes
- CAVITY QED WITH HIGH-Q WHISPERING GALLERY MODES
- High-Q measurements of fused-silica microspheres in the near infrared.
- High-Q wet-etched GaAs microdisks containing InAs quantum boxes
- Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system
- Cavity quantum electrodynamic enhancement of stimulated emission in microdroplets.
- Excitation of resonances of microspheres on an optical fiber.
- Very high-Q whispering-gallery mode resonances observed on fused silica microspheres
- Whispering-gallery mode microdisk lasers
- Laser activated flow of phosphosilicate glass in integrated circuit devices
- Evidence for intrinsic Kerr bistability of high-Q microsphere resonators in superfluid helium
- Controlled CO2 laser melting of silicon
- Very low threshold whispering-gallery-mode microsphere laser.
- Phase-matched excitation of whispering-gallery-mode resonances by a fiber taper.
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- Optical Microring Resonators for Photoacoustic Imaging and Detection
- Fabrication of three-dimensional plasmonic cavity by femtosecond laser-induced forward transfer.
- Spiral resonators for on-chip laser frequency stabilization
- Broadband infrared spectroscopy using optical parametric oscillation in a radially-poled whispering gallery resonator.
- Dispersion engineering of a microsphere via multi-layer coating.
- Ultra-high quality factor metallic micro-cavity based on concentric double metal-insulator-metal rings
- Photonic Crystals For Optofluidic Transport, Trapping And Biosensing
- Cavity Optomechanics Radiation pressure cooling of a micromechanical resonator
- Crystalline Whispering Gallery Mode Resonators for Quantum and Nonlinear Optics
- Open Quantum System Studies of Optical Lattices and Nonlinear Optical Cavities: A Comprehensive Development of Atomtronics
- Plasmonic cavities and optical nanosources
- Goblits To Omg: 3D Fabrication Techniques For An Opto-Mechanical Gyroscope
- Asymmetric Transport Using Nonlinear Parity-Time Symmetric Structures
- Ultra-broadband frequency generation in a cavity confined Raman medium
- Fabrication et étude optique de microcavités à modes de galerie intégrées sur silicium
- DYNAMIC SILICON NANOPHOTONIC DEVICES
- Bragg-grating-based rare-earth-ion-doped channel waveguide lasers and their applications
- On-Chip Integrated Label-Free Optical Biosensing
- Quantum Computing Hardware based on Rare-Earth-Ion Doped Whispering-Gallery Mode Resonators
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