Fundamentals of microfabrication : the science of miniaturization
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- Type
- book
- Published
- 2002-01-01
- Cited by
- 2,040
- References
- 0
- OpenAlex
- https://openalex.org/W636847917
- Semantic Scholar
- https://api.semanticscholar.org/CorpusID:135647812
Keywords
Surface micromachining, Materials science, Etching (microfabrication), Photolithography, Dry etching
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