Buckled cantilever 3D microstructures for transducer applications

Keywords

Cantilever, Transducer, Microstructure, Materials science, Mechanical engineering

References

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• Buckled cantilevers for out-of-plane platformsRobert W. Johnstone, Oswaldo Hideo Ando, Dan Sameoto — 2008
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Cited by

• Micromachined three-axis thermal accelerometer with a single composite heaterJamal Bahari, Albert M. Leung — 2011
• Micro Electro Mechanical Gyroscope Based on Thermal PrinciplesJ. Bahari — 2019
• Design and Simulation of Vertical Bi-Directional Fringe Field Tuning of New Improved MEMS Accelerometer Using SOI Technology for Stress CompensationManoj Kumar Dounkal, R. K. Bhan, Navin Kumar — 2022

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