Process Development For High Speed Superconductor Microelectronics For Digital and Mixed Signal Applications
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- Published
- 2008-05-01
- Cited by
- 0
- References
- 87
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- https://api.semanticscholar.org/CorpusID:107740680
References
- Resolution enhancement techniques for optical lithography
- Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California
- Applications of superconductivity
- Superconductor Digital-RF Transceiver Components
- Dynamics of the Josephson junction
- Tunneling spectroscopy studies of treated aluminum oxide tunnel barrier layers
- The Science and Engineering of Microelectronic Fabrication
- Conductivity of superconducting films for photon energies between 0. 3 and 40 kT/sub c/
- Self‐aligned contact process for Nb/Al‐AlOx/Nb Josephson junctions
- Nb Josephson tunnel junctions with thin layers of Al near the barrier
- High-resolution ADC operation up to 19.6 GHz clock frequency
- ANODIC OXIDE FILMS
- Selective niobium anodization process for fabricating Josephson tunnel junctions
- Oxygen stoichiometry and instability in aluminum oxide tunnel barrier layers
- Mass Dependence of the Superconducting Transition Temperature of Mercury
- Bound electron pairs in a degenerate Fermi gas
- New selective anodization process for Nb Josephson junction with AlO/sub x/ barrier
- Effect of ac Impedance on dc Voltage‐Current Characteristics of Superconductor Weak‐Link Junctions
- Principles of Superconductive Devices and Circuits
- Plasma process-induced damage to Josephson tunnel junctions in superconducting integrated circuits
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