Charakterisierung und Optimierung elektrochemisch abgeschiedener Kupferdünnschichtmetallisierungen für Leitbahnen höchstintegrierter Schaltkreise

Keywords

Computer science

References

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Cited by

• Advanced characterisation of thermo-mechanical fatigue mechanisms of different copper film systems for wafer metallizationsStephan Bigl, Stefan Wurster, Megan J. Cordill — 2016

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