A MEMS Multi-Cantilever Variable Capacitor On Metamaterial

Keywords

Metamaterial, Microelectromechanical systems, Split-ring resonator, Capacitive sensing, Capacitance

References

• Electrostatic Radio Frequency (RF) Microelectromechanical Systems (MEMS) Switches With Metal Alloy Electric ContactsRonald A. Coutu — 2004
• RF MEMS: Theory, Design and TechnologyGabriel M. Rebeiz — 2003
• Acceleration of Dielectric Charging in RF MEMS Capacitive SwitchesXiaobin Yuan, Zhen Peng, James C. M. Hwang — 2006
• Modern Microwave Transistors: Theory, Design, and PerformanceFrank Schwierz, Juin J. Liou — 2002
• Fundamentals of Semiconductor FabricationGary S. May, Simon M. Sze — 2003
• Microwave Transistor Amplifiers: Analysis and DesignGuillermo González — 1984
• MEMS: A Practical Guide to Design, Analysis, and ApplicationsJan G. Korvink, Paul, Oliver — 2005
• Capacitor-loaded split ring resonators as tunable metamaterial componentsKoray Aydın, Ekmel Özbay — 2007
• Electromagnetic parameter retrieval from inhomogeneous metamaterials.David R. Smith, D. C. Vier, Thomas Koschny — 2005
• Surface micromachined RF MEMS variable capacitorDongming Fang, Shi Fu, Ying Cao — 2007
• Modulating and tuning the response of metamaterials at the unit cell level.Aloyse Degiron, Jack J. Mock, David R. Smith — 2007
• Performance of low-loss RF MEMS capacitive switchesCharles L. Goldsmith, Zhimin Yao, S. Eshelman — 1998
• Local constitutive parameters of metamaterials from an effective-medium perspectiveConstantin Simovski, Sergei Tretyakov — 2007
• An above IC MEMS RF switchD. Saias, Ph. Robert, S. Boret — 2003
• Metamaterials in electromagneticsAri Sihvola — 2007
• A high-tuning-range MEMS variable capacitor using carrier beamsMaher Bakri-Kassem, Raafat R. Mansour — 2006
• High-Power High-Reliability High-Q Switched RF MEMS CapacitorsAlex Grichener, Denis Mercier, Gabriel M. Rebeiz — 2006
• High Performance RF MEMS Series Contact Switch - Design and SimulationsLianjun Liu — 2007
• Characterization of Tunable Metamaterial Elements Using MEMS SwitchesThomas H. Hand, Steven A. Cummer — 2007
• Monolithically integrated micromachined RF MEMS capacitive switchesJae Yeong Park, Geun H. Kim, Ki Woong Chung — 2001

Cited by

• Characterization and Measurement of Passive and Active Metamaterial DevicesC. A. Lundell — 2012
• Electromagnetic Field Control and Optimization Using MetamaterialsJeffrey S. McGuirk — 2009
• Design, Fabrication and Testing of Two Dimensional Radio-Frequency MetamaterialsRussell P. Krones — 2014
• Design, fabrication and testing of tunable RF meta-atomsDerrick Langley — 2012
• Characterization of a Variation on AFIT’s Tunable MEMS Cantilever Array MetamaterialM. Jussaume, P. Collins, R. Coutu — 2011
• Characterization and Testing of Adaptive RF Metamaterial Structure Using MEMSC. A. Lundell, P. Collins, L. Starman — 2011
• MEMS integrated metamaterial structure having variable resonance for RF applicationsD. Langley, R. Coutu, L. Starman — 2011
• MEMS integrated metamaterials with variable resonance operating at RF frequenciesD. Langley, E. A. Moore, R. Coutu — 2011

Related papers

• Tunable Terahertz Filter and Modulator Based on Electrostatic MEMS Reconfigurable SRR ArrayZhengli Han, Kenta Kohno, Hiroyuki Fujita — 2015
• SRRs Embedded with MEMS Cantilevers to Enable Electrostatic Tuning of the Resonant FrequencyElizabeth A. Moore, D. Langley, Matthew E. Jussaume — 2011
• A MEMS reconfigurable metamaterial for terahertz filter applicationsZhengli Han, Kenta Kohno, Tapio Mäkelä — 2014
• Design of a MEMS-Based Capacitive Resonator for Target Analyte DetectionSerdar Tez, Ergun Aytaşkın — 2020
• Characterization of Tunable Metamaterial Elements Using MEMS SwitchesThomas H. Hand, Steven A. Cummer — 2007
• Electrostatically tunable MEMS THz metamaterials based on DC/RF decoupled split-ring resonator arraysZhengli Han, Hiroyuki Fujita, Hiroshi Toshiyoshi — 2012
• MEMS tunable metamaterials surfaces and their applicationsDmitry Chicherin, Mikael Sterner, Sergey Dudorov — 2010
• Split Ring Resonators (SRRs) Based on Micro-Electro-Mechanical Deflectable Cantilever-Type Rings: Application to Tunable Stopband FiltersDavid Bouyge, David Mardivirin, Jordi Bonache — 2011