Transmission scanning electron microscopy: Defect observations and image simulations.
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Summary
Interference effects associated with conventional TEM, such as thickness fringes and bending contours are significantly reduced in TSEM by using a convergent probe, similar to a STEM imaging modality, enabling individual defects to be imaged clearly even in high dislocation density regions.
- Type
- article
- Published
- 2018-03-01
- Cited by
- 48
- References
- 43
- OpenAlex
- https://openalex.org/W29268135
- Semantic Scholar
- https://api.semanticscholar.org/CorpusID:3452986
Keywords
Physics
References
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