Software design considerations for testing dynamics of MEMS/microsystems.
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Summary
The design of dynamic-testing software for experimental investigation of MEMS dynamics including linear and nonlinear multi-physics phenomena is presented and the effectiveness of the software is shown by dynamic testing of various MEMS beams under varying ambient pressure.
- Type
- article
- Published
- 2004-06-01
- Cited by
- 1
- References
- 11
- OpenAlex
- https://openalex.org/W17519328
- Semantic Scholar
- https://api.semanticscholar.org/CorpusID:14047324
Keywords
Microsystem, Microelectromechanical systems, Actuator, Software, Computer science
References
- Dynamic measurement of gas damping effects in MEMS.
- Modal Analysis Theory and Testing
- Modal Testing: Theory, Practice, And Application
- The Fundamentals of FFT-Based Signal Analysis and Measurement in LabVIEW and LabWindows
- Theoretical and Experimental Modal Analysis of a 6 PUS PKM
- A Base Excitation Test Facility for Dynamic Testing of Microsystems
- EXPERIMENTAL MODAL ANALYSIS FOR MICROSYSTEMS
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