Software design considerations for testing dynamics of MEMS/microsystems.

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Summary

The design of dynamic-testing software for experimental investigation of MEMS dynamics including linear and nonlinear multi-physics phenomena is presented and the effectiveness of the software is shown by dynamic testing of various MEMS beams under varying ambient pressure.

Type
article
Published
2004-06-01
Cited by
1
References
11

Keywords

Microsystem, Microelectromechanical systems, Actuator, Software, Computer science

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