Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks.
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Summary
Rigorous coupled-wave analysis reveals the fundamental aspects of the optics associated with this method; a broad-range 3D nanostructures patterned with it demonstrates its technical capabilities.
- Type
- article
- Published
- 2004-08-24
- Cited by
- 275
- References
- 48
- Access
- Open access
- OpenAlex
- https://openalex.org/W2138498694
- Semantic Scholar
- https://api.semanticscholar.org/CorpusID:13146824
Keywords
Conformable matrix, Nanostructure, Nanoporous, Microfluidics, Materials science
References
- Porous polymer monoliths: an alternative to classical beads.
- A Velociraptor wishbone
- Surface-induced structure formation of polymer blends on patterned substrates
- On-chip natural assembly of silicon photonic bandgap crystals
- Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication
- Complex micromachines produced and driven by light
- Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
- Printing meets lithography: Soft approaches to high-resolution patterning
- The formation of controlled-porosity membranes from anodically oxidized aluminium
- Block copolymer lithography: Periodic arrays of ~1011 holes in 1 square centimeter
- A revolution in optical manipulation
- Microfabrication inside capillaries using multiphase laminar flow patterning
- Preparation of Macroporous Metal Films from Colloidal Crystals
- Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography
- Polymerized colloidal crystal hydrogel films as intelligent chemical sensing materials
- Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser
- Template Synthesis of Electronically Conductive Polymer Nanostructures
- Synthesis of macroporous minerals with highly ordered three-dimensional arrays of spheroidal voids
- Colloidal inks for directed assembly of 3-D periodic structures
- Photonic crystals through holographic lithography: Simple cubic, diamond-like, and gyroid-like structures
Cited by
- A theoretical roadmap for optical lithography of photonic band gap microchips
- Photonic-crystal waveguide structure by pattern-integrated interference lithography.
- Block copolymer photonic crystals : towards self-assembled active optical elements
- Holographic patterning of high-performance on-chip 3D lithium-ion microbatteries
- Nanostructured multifunctional materials for control of light transport and surface wettability
- Fabrication and characterization of nanofluidic channels for studying molecular dynamics in confined environments
- 2D and 3D periodic templates through holographic interference lithography : photonic and phononic crystals and biomimetic microlens arrays
- Microfluidic approaches to the synthesis of complex polymeric particles
- Single exposure fabrication and manipulation of 3D hydrogel cell microcarriers
- Design and Fabrication of Photonic Microstructures by Holographic Lithography and Pattern Transformation
- Multi-beam-interference-based methodology for the fabrication of photonic crystal structures
- Solvent-resistant elastomeric microfluidic devices and applications
- Three-dimensional micro/nanoscale architectures: fabrication and applications.
- Sub-wavelength optical phenomena and their applications in nano-fabrication
- Rapid, High‐Resolution 3D Interference Printing of Multilevel Ultralong Nanochannel Arrays for High‐Throughput Nanofluidic Transport
- Standing‐Wave‐Assisted Creation of Nanopillar Arrays with Vertically Integrated Nanogaps for SERS‐Active Substrates
- Layered nano-gratings by electron beam writing to form 3-level diffractive optical elements for 3D phase-offset holographic lithography.
- Dual exposure, two-photon, conformal phase mask lithography for three dimensional silicon inverse woodpile photonic crystals
- Fabrication of polymeric and silica ceramic porous microstructures by perfluoropolyether based soft lithography
- Integrated three-dimensional filter separates nanoscale from microscale elements in a microfluidic chip.
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